KLA-Tencor Flexus 5400 (SOLD)

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Category:

Metrology & Inspection

Make:

KLA Tencor

Model:

Flexus 5400

Serial Number:

0296-4491, 1296-4567, 0198-4651

Wafer Size:

200mm

Vintage:

1998

KLA Tencor FLX-5400 Automated Thin Film Stress Measurement System

Provides automated monitoring of thin film process up 200mm wafers

Throughput up to 60 wafers per Hour

Dual Wavelength Technology

3 systems available, contact for more information

CapEx Outsource, LLC