Return to Inventory
Click to see a larger image
Quantum Sources
DC Biasable SST Heaters
Digital Eurotherm Heater Controllers
Recipe Controlled Heaters
RF Etch Station with Heat
Low Voltage Ignitor
Vips Option with V200 Turbo Pump
Load Lock Turbo Option with V70 Turbo Pump
ECS Control System
17 Inch Touchscreen Monitor
Ferro-Fluidic Coaxial Feedthru
12KW Gen II Power Supplies (Switchable to 3 or 6KW)
CTi On-Board Cryo Pump with Compressor
Optional CTi Water Pump ( Available upon request )