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Make:
TEL (Tokyo Electron Corp)
Tokyo Electron Limited (TEL) * 6 Units Available
Manufacturer: TEL. Model: P8XL. Serial: PL04170 Serial: PL04005,Serial: PL02708,Serial: PL02916, Serial: PL04001, Serial: PL04025.
Vintage: 2000. Capabilities: 4, 5, 6, and 8 inch wafers, Autoloader,
real Time Wafer Map Display, Control Map.
Software VIP3
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Dual Loader, Wide
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Cold Ready: D204 chiller
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Head Plate is based on a 350mm interface.
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SACC
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WAPP Polish Plate
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GPIB
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RS232
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OCR = Cognex 1700
