Handler Type H2
Handler option 100mm - 200mm Open Cassette
Measurement Range 5mΩ/sq - 5MΩ/sq
Repeatability (VLSI) < 0.2% (1σ)
Accuracy (VLSI) ±1%
Edge Exclusion 3mm from edge of film
Temperature Accuracy n/a
Temperature Repeatability n/a
Throughput (5-site) 3.5 - 4.5s per Site
Alignment System Pre-Aligner
Factory Automation Basic SECSII
Computer OS DOS
Computer Configuration 486
