KLA 6200 Surfscan (SOLD)

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Category:

Metrology & Inspection

Make:

KLA Tencor

Model:

6200 Surfscan

Wafer Size:

200mm

Surfscan 6200 Wafer Surface Analysis System

Counts defects down to 0.09 µm at an 80% capture rate

Wafer size range from 100 mm to 200 mm

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