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ASML 5500/100C Steppers
Wafer Size 200mm Flat : Reticle Size 6 inch
Serial Numbers 6748 & 5067
Cassette position 1 & 2
Wafer track interface TEL Mark5/7/8/ ACT 8
SECS 1 and 2 Interface
Batch Streaming RMS
Image Quality Control
Tape streamer OCU-MK4 or less
Single reticle SMIF Handling
PEP1 and PEP2
Thernet interface
Reticle error compensation
Focal
SECS Exception Logging
Intensity 2
SW rel 8.8.6
Additional information and Lens Qualification Data available upon request
